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            AP300
            产品描述

            -Manufacturer : Ultratech

            -Type : Wafer Stepper

            -Model : AP300


            技术支持

            Ultratech Stepper AP300 (i-Line Stepper) 

            Configuration:

            1、 Standard Features Target: 

            -2.0 um, Extended Field, ghi-lineBroadband Lens ∙  Dual 1200 W LampIlluminator

            -Universal Size/Warped Wafer Kit: 200,and 300mm.

            -FOSB Cassette to Cassette WaferHandling

            -Wafer Thickness Handling from 0.4 mmto 2.0 mm 

            -PATMAX MVS Alignment System

            -MVS Alignment Spectrum of 530 - 570 nm 

            -Lens Distortion Reference - No lensmatching 

            -6 Slot Reticle Stack, Manual FrontLoading   GEM HSMS Communications 

            -Power Source: 208 V three phase, 5wire, 150 amp 

            -Environmental Chamber

            2、 AP300 Test Reticle 6x6

            3、 FOUP Wafer Handler

            4、 Enhanced Bottom Pellicle Protection

            5、 ghi-line AutoFilter Changer 

            6、 Edge Exclusion System with one Exclusion Ring Specify ring size (15mm) 

            7、 Closed Loop Cooling 

            8、 Prism Purge Kit (requires CLC) 


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            上海友相电子科技有限UG国际娱乐

            地址:上海嘉定区曹安公路5588号814

            电话:+86 21 58886448      +86 13182712576(周先生)

            传真:+86 21 58886440      Email: yi_zhou@chinauvision.com