UG国际娱乐

    1. <form id='189ku'></form>
        <bdo id='189ku'><sup id='189ku'><div id='189ku'><bdo id='189ku'></bdo></div></sup></bdo>

            CN
            EN CN
            Ultratech Saturn Spectrum 3e
            产品描述

            -Manufacturer : Ultratech

            -Type : Wafer Stepper

            -Model : Saturn Spectrum 3e


            技术支持

            Major Specifications:
            ghi-line Broadband Lens
            - Universal Wafer Size Change Kit: 4", 5" ,6" &8"
            - Auto Wafer Thickness Compensator (0.4 to 4.0mm)
            - Robotic Wafer Handler
            - PATMAX MVS Alignment System
            - Lens Distortion Reference-No lens matching
            - 6x6 inch Reticle Type
            - Dual Flip Aperture, 2,3 and 4 field
            - Dynamic Focus w/extended range+200um
            - Stepper Power Source: 208 three phase
            - Environmental Chamber
            - Chamber Power Source: 208 three phase
            - SECSII Compatible
            - ghi-line Automatic Filter Changer
            - 1200 W Illuminator
            Options to include:
            - Bottom Pellicle Protection
            - 44mm x 26.7mm Field Size
            - SEMI standard. JEIDA standard is optional.

            NOTE: with SMIF, only 150mm and 200mm are valid options for wafer size.

            返回列表
            联系
            Contact
            上海友相电子科技有限UG国际娱乐

            地址:上海嘉定区曹安公路5588号814

            电话:+86 21 58886448      +86 13182712576(周先生)

            传真:+86 21 58886440      Email: yi_zhou@chinauvision.com