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          2. CN
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            Quantum X Plus High Current Implanter
            产品描述

            -Manufacturer : AMAT

            -Type : Sputtering System

            -Model : Quantum X Plus


            技术支持

            EQUIPMENT DETAILS:
            Currently configured for 300mm wafer sizes Inspect to confirm configuration and condition. Process: Low Energy/High Current
            Software version: 2.07
            System Power Rating: 208 AC 3-Phase for System 4 Load Ports
            Mainframe Chamber: N2/Ar/AsH3/BF3/PH3/CDA


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            地址:上海嘉定区曹安公路5588号814

            电话:+86 21 58886448      +86 13182712576(周先生)

            传真:+86 21 58886440      Email: yi_zhou@chinauvision.com